SIZE >4 INCH (SHAPE AND DIMENSION CUSTOMZABLE)
GROWTH METHOD: MPCVD
THICKNESS: 0.3-2.0mm
DENSITY: 3.52（×103Kg·m-3）
VIKERS HARDNESS: 80-100GPa
YOUNG’S MODULUS 1050GPa
SURFACE ROUGHNESS: Ra < 30nm
THERMAL CONDUCTIVITY: 1200-2200W/m·K
THERMAL EXPANSION: 1×10-6/K@300K
SPECIFIC HEAT CAPACITY: 0.502J/gK@300K
BOW: < 20μm@4inch
WARPAGE: < 20μm@4inch
TTV: <20 µm
THICKNESS TOLERANCE: ±0.05 mm
WARPAGE: ≤20 µm
