Wafer Annealing SiC Chuck
SiC Wafer Rapid Annealing
IGBT Ion Implantation Annealing
Low particle contamination
High thermal conductive
High temperature tolerant
CERAMERIC SEMIXICON
Wafer Annealing SiC Chuck
SiC Wafer Rapid Annealing
IGBT Ion Implantation Annealing
Low particle contamination
High thermal conductive
High temperature tolerant
CERAMERIC SEMIXICON
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