We provide service of refurbishing , rebuild or custom design of various electrostatic chucks.
The electrostatic chuck (ESC) is widely applied in multiple semiconductor processes to hold the wafer in operation, we utilize Silicon Carbide , silicon nitride ,SiSic , Zerodur,or Boro sillicate glass etc silicon wafer matched thermal expansion materials to achieve advanced level of global and local flatness, currently the sizes are available from 100mm to 450mm.
Applications:
Inspection
Metrology
Coating (OLED)
Lithography
Wafer thinning
Wafer handling
Etch process
CVD and PVD
Dielectric Substrates (LED and Solar industry)
MEMS
