Silicon Rubber Chuck Membrane for AMAT Mirra Mesa , LK

OEM Tools	Product Name	OEM PN
EBARA	EBARA G3 Head	C-3250-000-2200 C-1100-419-0001 C-3558-892-0001 C-3140-000-6300 C-3812-545-0001
EBARA	Chucking Plate	C-3570-440-0001
EBARA	Holder	C-3558-395-0001
EBARA	Edge Ring	C-3812-436-0001
EBARA	12" EBARA Stopper Membrane(G2)	C-4111-176-0001
EBARA	Membrane G3 T2 70(298)	C-4111-294-0001
EBARA	Membrane G3 V2R 50	C-4111-295-0101
EBARA	Membrane G3 V2R(70)	C-4111-295-0001
EBARA	Membrane G3 V2 1F 150 F6(LEF)	C-1000-008-7500
EBARA	Membrane(G2S)	(NEW) C-4000-015-0700 (OLD) C-4111-184-0001
EBARA	12'Ebara Membrane Chuck Plate(G2)	C-3571-198-0001
EBARA	Stop Edge Ring (G2)	C-3812-447-0001
EBARA	Holder RMT (G2）	C-3558-600-0011
EBARA	Chucking Plate T2(G2S head)-1	C-3570-672-0001
EBARA	Chucking Plate T2(G2S head)-2	C-3812-460-0001
EBARA	Chucking Plate T2(G2S head)-3	C-3812-464-0001
EBARA	Chucking Plate T2(G2S head)-4	C-3558-704-0001
EBARA	Chucking Plate T2 (G2S head)-5	C-3532-475-0001
EBARA	Silicon Backing Film Typ=C	C-4000-035-4700
EBARA	Membrane G38F4 (50)	C-4000-032-4700
EBARA	Membrane (SP+)	0020-75119/ 0021-33808
EBARA	12" AMAT Membrane, 300mm Titan (contour)	0020-75118
EBARA	Membrane,Coated Silicon 300mm Titan	0020-75115
EBARA	MEMBRANE (contour	0020-83889
	Membrane 300 TITAN	0030-00747
MIRRA	8" CMP Titan Head Membrane	0020-75169/ 0020-75131/ 0021-17298/ 0021-33694
MIRRA	T1-Membrane	0020-75164- 001 0021- 81354-02 0021-33783
MIRRA	T1-Membrane	0020-75134 0020-75120 0020-75160