Silicon Rubber Chuck Membrane for AMAT Mirra Mesa , LK
OEM Tools | Product Name | OEM PN |
EBARA | EBARA G3 Head | C-3250-000-2200 C-1100-419-0001 C-3558-892-0001 C-3140-000-6300C-3812-545-0001 |
EBARA | Chucking Plate | C-3570-440-0001 |
EBARA | Holder | C-3558-395-0001 |
EBARA | Edge Ring | C-3812-436-0001 |
EBARA | 12" EBARA Stopper Membrane(G2) | C-4111-176-0001 |
EBARA | Membrane G3 T2 70(298) | C-4111-294-0001 |
EBARA | Membrane G3 V2R 50 | C-4111-295-0101 |
EBARA | Membrane G3 V2R(70) | C-4111-295-0001 |
EBARA | Membrane G3 V2 1F 150 F6(LEF) | C-1000-008-7500 |
EBARA | Membrane(G2S) | (NEW) C-4000-015-0700 (OLD) C-4111-184-0001 |
EBARA | 12'Ebara Membrane Chuck Plate(G2) | C-3571-198-0001 |
EBARA | Stop Edge Ring (G2) | C-3812-447-0001 |
EBARA | Holder RMT (G2) | C-3558-600-0011 |
EBARA | Chucking Plate T2(G2S head)-1 | C-3570-672-0001 |
EBARA | Chucking Plate T2(G2S head)-2 | C-3812-460-0001 |
EBARA | Chucking Plate T2(G2S head)-3 | C-3812-464-0001 |
EBARA | Chucking Plate T2(G2S head)-4 | C-3558-704-0001 |
EBARA | Chucking Plate T2 (G2S head)-5 | C-3532-475-0001 |
EBARA | Silicon Backing Film Typ=C | C-4000-035-4700 |
EBARA | Membrane G38F4 (50) | C-4000-032-4700 |
EBARA | Membrane (SP+) | 0020-75119/ 0021-33808 |
EBARA | 12" AMAT Membrane, 300mm Titan (contour) | 0020-75118 |
EBARA | Membrane,Coated Silicon 300mm Titan | 0020-75115 |
EBARA | MEMBRANE (contour | 0020-83889 |
Membrane 300 TITAN | 0030-00747 | |
MIRRA | 8" CMP Titan Head Membrane | 0020-75169/ 0020-75131/ 0021-17298/ 0021-33694 |
MIRRA | T1-Membrane | 0020-75164- 001 0021- 81354-02 0021-33783 |
MIRRA | T1-Membrane | 0020-75134 0020-75120 0020-75160 |