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10-22-2024

Silicon Rubber Chuck Membrane for AMAT Mirra Mesa , LK

OEM ToolsProduct NameOEM PN
EBARAEBARA G3 HeadC-3250-000-2200

C-1100-419-0001

C-3558-892-0001

C-3140-000-6300
C-3812-545-0001
EBARAChucking PlateC-3570-440-0001
EBARAHolderC-3558-395-0001
EBARAEdge RingC-3812-436-0001
EBARA12" EBARA Stopper
    Membrane(G2) 
C-4111-176-0001
EBARAMembrane G3 T2 70(298)C-4111-294-0001
EBARAMembrane G3 V2R 50C-4111-295-0101
EBARAMembrane G3 V2R(70) C-4111-295-0001
EBARAMembrane G3 V2 1F 150
    F6(LEF)
C-1000-008-7500
EBARAMembrane(G2S)(NEW) C-4000-015-0700
(OLD)  C-4111-184-0001
EBARA12'Ebara Membrane Chuck
    Plate(G2)
C-3571-198-0001
EBARAStop Edge Ring (G2)C-3812-447-0001
EBARAHolder RMT (G2)C-3558-600-0011
EBARAChucking Plate T2(G2S
    head)-1
C-3570-672-0001 
EBARAChucking Plate T2(G2S
    head)-2
C-3812-460-0001
EBARAChucking Plate T2(G2S
    head)-3
C-3812-464-0001
EBARAChucking Plate T2(G2S
    head)-4
C-3558-704-0001
EBARAChucking Plate T2 (G2S
    head)-5
C-3532-475-0001
EBARASilicon Backing Film Typ=CC-4000-035-4700
EBARAMembrane G38F4 (50)C-4000-032-4700
EBARAMembrane (SP+)0020-75119/
    0021-33808
EBARA12" AMAT Membrane,
    300mm Titan (contour)
0020-75118
EBARAMembrane,Coated Silicon
    300mm Titan
0020-75115
EBARAMEMBRANE (contour0020-83889

Membrane 300 TITAN0030-00747
MIRRA8" CMP Titan Head Membrane0020-75169/
0020-75131/
0021-17298/
0021-33694
MIRRAT1-Membrane0020-75164- 001
0021- 81354-02 0021-33783
MIRRAT1-Membrane0020-75134
0020-75120
0020-75160


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