semiXicon provides high quality electrostatic chuck used in HITACHI, LAM,TEL,AMAT,VARIAN,SEMCO etch and CVD systems refurbishing , rebuilding and redesigning services,this can be a significant cost and lead time reduction to semicon,solar,LED and MEMS industry.
The services includes:
Incoming inspection
Measurement of orveral surface parallelism and flatness and mechanical dimensions
Dielectric thickness measurements
Ultrasonic bond inspection
Cosmetic inspection
Refurbishing
Remove deposition material from ESC
Resealing ceramic and heater
Resurface wafer contact surface
Verification test
Surface roughness
Wafer clamping forces
ESC voltages
ESC vacuum
Declamping