Concave or Convex Shape SiSiC Pin Chuck

Specially designed SiSiC Pin Chuck for Warpage Wafer ,Concave or Convex

Calculated Wafer Pin Diameter, Pin Pitch and Layout

Ring and holes treatment

Concave and Convex compensation

300nm Flatness through global 300mm

30nm Flatness through local 30X30mm

450mm process ready