DLC Coating on Semiconductor Wafer Pin Chuck from SEMIXICON CERAMERIC

Semixicon Cerameric is newly introducing DLC coating on our Aluminum Oxide, Silicon Carbide ceramic wafer carrier, vacuum chuck , especially the Silicon Carbide pin chuck products.

The wafer carrier/chuck table is to hold Si , SiC, GaAs, Gan etc semiconductor wafers in various semiconductor process from inspection to lithography  as well as other high precision requirement application include holding large ,thin flexible flat display panels, MEMS and biology cells.

The DLC coating has many desirable properties such as durable resistance and high thermal conductivity to maximize product life, retain precision and reduce friction and contamination.

A vacuum pin chuck consists of a rigid body with a plurality of pins on the surface on which the wafer or panel rests, the deviations of the global and local flatness are super precision in nanometers ,in this case, the problem with applying a DLC coating to the entire surface of the pin chuck is the thermal expansion mismatch might cause the planarity loss, Semixicon is implementing a unique process to selective coat DLC layer with thickness from 0.35 to 2 micron  on the pin tops only and leave the valleys between the pins uncovered.

Detailed introduction is available :  sales@semixicon.com