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End Effectors

Ceramic end effectors are robots arms used for silicon wafer transportation and handling.


Alumina ,zirconia Sic etc ceramic materials are used plus optional special coatings for excellent wear resistance, high rigidity and harsh environment tolerance.


Cerami end effectors come in different shapes and sizes of up to 18 inches. They can also be provided with a vacuum chuck or electro-static chuck function. Ceramic hands with an electro-static chuck function can be used for conveyance in a vacuum.