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Electrostatic Chuck (ESC)



We provide service of refurbishment , rebuild or custom design of various electro static chucks.
The electrostatic chuck (ESC) is widely applied in multiple semiconductor processes to hold the wafer in operation, we utilize Silicon Carbide , silicon nitride ,SiSic , Zerodur,or Borosillicate glass etc silicon wafer matched thermal expansion materials to achieve advanced level of global and local flatness, currently the sizes are available from 100mm to 450mm.
Applications:
Inspection
Metrology
Coating (OLED)
Lithography
Wafer thinning
Wafer handling
Etch process
CVD and PVD
Dielectric Substrates (LED and Solar industry)
MEMS