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Porous Vacuum Chuck




The semiXicon porous vacuum chuck series are designed for use with thin films and other flat samples. The chuck has uniform distributed pore sizes to assure desirable sucking and holding power for very thin films ,it is widely applied in electronic, semiconductor, ,solar,medical and optical etc industry.

We can custom design per your application to turn them into individual working stations or integrate into your production lines.

The chucks are of various parallelism we can build from 1 micron on 300mm round to 15micron on 450*450mm .

Picture and Drawings can be provided upon request.

The series have various shapes and dimensions,but standard one are:

Round: 4",5",6",8,"9”,12"
Squre: 4",5",6",8
Rectangle:2*4, 4*6, 6*8, 6*12

Turn key solution including pump is optional

Applications:

Semiconductor
Thin film
Optical
Solar
MEMS
Battery
Biomedical

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Porous Ceramic Chuck DrawingPorous Ceramic Chuck Drawing