| Home |

Wafer chuck table repair and rebuild


 

To achieve highest possible parallelism and flatness, we have designed all ceramic chuck table which is stable in both ambient and harsh environment. Applications:  

Applications

wafer inspection
wafer grinding
wafer cleaning
wafer dicing
...

DISCO
DAC-552
DAD-2H/6
DAD-2h/6T
DAD-320
DAD-321
DAD-3350
DAD-340
DAD-341
DAD-521
DAD-641
DAD-651
DFD-651
DFD-6361
DFD-6362
DFD-6340
DAD-3220/3230/3430
DFG-8540 GRINDER
DAG-810 GRINDER

ADT
7120/7130
7200
7900
977
 
ACCRETECH
AD3000T/S
AD2000T/S
AD20T/S
SS10,SS20,SS30
PS290PLUS
ML300PLUS 
ML200 PLUS 
A-CS-100A
PG3000RM/PG200RM

TSK
TSK AWD200T
TSK AWD300T

K&S
K&S-982-6
K&S-982-10

Strasbaugh
7AA-II 
7AF-II
6DS
6EC
 
Loadpoint
MICROACE 66
NANOACE300
NANOACE200
NANOACE VS
MACROACE

Applied Materials
Okamoto VG-502MKII-8

Shuwa
SGM-7000
SGM-6301
 
Micro Automation
1100
1006A

Download

Wafer Chuck TableWafer Chuck Table

DFG8540 Wafer GrinderDFG8540 Wafer Grinder